Fundamentals of microfabrication

フォーマット:
図書
責任表示:
Marc Madou
言語:
英語
出版情報:
Boca Raton, Fla. : CRC Press, c1997
形態:
589 p., [22] p. of plates : ill. (some col.) ; 29 cm
著者名:
Madou, Marc J. <DA0355770X>  
書誌ID:
BA33862386
ISBN:
9780849394515 [0849394511]  CiNii Books  Google Books
子書誌情報
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