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3D TCAD simulation for semiconductor processes, devices and optoelectronics

フォーマット:
図書
責任表示:
Simon Li, Yue Fu
言語:
英語
出版情報:
New York : Springer, c2012
形態:
xiv, 292 p. : ill. (mostly col.) ; 24 cm
著者名:
目次情報:
1. Semiconductor industry and TCAD
2. Advanced theory of TCAD process simulation
3. Advanced theory of TCAD device simulation
4. Setting up a 3D TCAD simulation
5.P-N junction diode
6. MOSFET/CMOS technology
7. Smart power technology and power semiconductor devices
8. 3D interconnect simulation
9. CMOS image sensor
10. Hybrid silicon laser
1. Semiconductor industry and TCAD
2. Advanced theory of TCAD process simulation
3. Advanced theory of TCAD device simulation
4. Setting up a 3D TCAD simulation
5.P-N junction diode
6. MOSFET/CMOS technology
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書誌ID:
LT00565327
ISBN:
(alk. paper)
(eISBN)
子書誌情報
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