The physics of micro/nano-fabrication

フォーマット:
図書
責任表示:
Ivor Brodie and Julius J. Muray
言語:
英語
出版情報:
New York : Plenum Press, c1992
形態:
xix, 650 p. : ill. ; 26 cm
著者名:
シリーズ名:
Microdevices : physics and fabrication technologies <BA03567081>
書誌ID:
BA1990816X
ISBN:
9780306441462 [0306441462]  CiNii Books  Webcat Plus  Google Books
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