低剛性の自動輪郭測定装置における計測補正の解析

フォーマット:

論文

責任表示:

永井, 健一 ; 笹井, 重俊 ; 長屋, 幸助 ; 武田, 定彦 ; 内山, 茂

言語:

日本語

出版情報:

日本機械学会, 1989-01-25

著者名:

• 永井, 健一
• 笹井, 重俊
• 長屋, 幸助
• 武田, 定彦
• 内山, 茂

掲載情報:

日本機械学會論文集. C編

ISSN:

0387-5024    

巻:

55

通号:

509

開始ページ:

79

終了ページ:

83

バージョン:

VoR

概要:

application/pdf<br />Journal Article<br />This paper presents a method for the error compensation of measuring data in a two-dimensional length measuring device from lack of sufficient stiffness. Introducing the mode shape function which is expressed with the product of the finite power series truncated with fourth order and the trigonometric function to the least square approximation. Applying the method to the test device, the effects of … compensation are clarified. It is found that this method gives good results to improve the measuring accuracy with the limited number of terms for unknown coefficients, compared with the approach of the Fourier series. 続きを見る